• School of Engineering and Applied Science, Aston University

      B4 7ET Birmingham

      United Kingdom

    Accepting PhD Students

    19972016
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    Research Output 1997 2016

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    Chapter
    2003

    AFM oxidation of Ti for nanoscale IC applications

    Hill, D., Sadewasser, S. & Aymerich, X., 1 Jan 2003, Microscopy of Semiconducting Materials 2003. CRC Press, p. 665-668 4 p.

    Research output: Chapter in Book/Report/Conference proceedingChapter

    Atomic force microscopy
    Oxidation
    Anodic oxidation
    Polysilicon
    Integrated circuits