Research Output per year
Research Output 1997 2016
2003
AFM oxidation of Ti for nanoscale IC applications
Hill, D., Sadewasser, S. & Aymerich, X., 1 Jan 2003, Microscopy of Semiconducting Materials 2003. CRC Press, p. 665-668 4 p.Research output: Chapter in Book/Report/Conference proceeding › Chapter
Atomic force microscopy
Oxidation
Anodic oxidation
Polysilicon
Integrated circuits